Spatial ALD Nano Coating Technology

SparkNano is a high-tech product company that designs and commercializes spatial Atomic Layer Deposition (spatial ALD) tools, enabling its customers to deposit high throughput nano scale coatings.

Spatial ALD expands the capability of ALD by introducing spatial separation between the precursor and the co-reactant. Instead of depositing the precursors directly on the substrate in a sequential manner, they are kept physically separated in space. This enables a faster and more flexible deposition.

Using our spatial ALD technology and tools, we offer coatings with a variety of materials, including Al, Ir, IrOx, Pt, SiO2, TiO2, ZnO, and many more, depending on the application and specific requirements. We also provide in-house sampling on our spatial ALD tool to test and validate customer requests and concepts. For more information on deposition possibilities, please contact us at info@spark-nano.com.

Using our Spatial ALD technology and tools, we offer coatings with a variety of materials, including Al, Ir, IrOx, Pt, SiO2, TiO2, ZnO, and many more, depending on the application and specific requirements. We also provide in-house sampling on our spatial ALD tool to test and validate customer requests and concepts. For more information on deposition possibilities, please contact us at info@spark-nano.com.