Vellum Series

Vellum is tailored designed for sheet to sheet (S2S) applications for deposition on substrates ranging from 0,5 x 0,5m up to 1 x 1.5 m.

Substrates like metal or polymer foils, wafers, glass and porous substrates. All aimed at real production throughput up to 20 substrates per minute. In combination with a large variety of deposition materials and deposition temperatures.
The substrate flow handling and inline integrated set-up of the system will be in designed as the overall set-up requires.

The Vellum product line is a fully automatic processing platform for high throughput.

Key features Vellum Series

Substrate types

flat substrates like polymer and metal foils, wafers, glass and porous substrates

Substrate size

0,5×0,5 to 1,0×1,5m


Both thermal as plasma enhanced s-ALD

Download the complete data sheet
for the Vellum Series now.

Other SparkNano Spatial ALD solutions

Labline series

Designed for versatility and flexibility

See product

Omega Series

Proven roll-to-roll (R2R) system for ultra-high-volume Spatial ALD production on flexible foils

See product

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