Vellum Series
Vellum is tailored designed for sheet to sheet (S2S) applications for deposition on substrates ranging from 0,5 x 0,5m up to 1 x 1.5 m.
Substrates like metal or polymer foils, wafers, glass and porous substrates. All aimed at real production throughput up to 20 substrates per minute. In combination with a large variety of deposition materials and deposition temperatures.
The substrate flow handling and inline integrated set-up of the system will be in designed as the overall set-up requires.
The Vellum product line is a fully automatic processing platform for high throughput.
Key features Vellum Series
Substrate types
flat substrates like polymer and metal foils, wafers, glass and porous substrates
Substrate size
0,5×0,5 to 1,0×1,5m
Process
Both thermal as plasma enhanced s-ALD
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Other SparkNano Spatial ALD solutions
Omega Series
Proven roll-to-roll (R2R) system for ultra-high-volume Spatial ALD production on flexible foils
See product