Vellum is tailored designed for sheet to sheet (S2S) applications for deposition on substrates ranging from 0,5 x 0,5m up to 1 x 1.5 m.
Substrates like metal or polymer foils, wafers, glass and porous substrates. All aimed at real production throughput up to 20 substrates per minute. In combination with a large variety of deposition materials and deposition temperatures.
The substrate flow handling and inline integrated set-up of the system will be in designed as the overall set-up requires.
The Vellum product line is a fully automatic processing platform for high throughput.
Key features Vellum Series
flat substrates like polymer and metal foils, wafers, glass and porous substrates
0,5×0,5 to 1,0×1,5m
Both thermal as plasma enhanced s-ALD