SparkNano Products

Sparknano offers Spatial ALD deposition tools that enables you to deposit atomic scale layers at high speed and low cost of ownership.

Equipped with SparkNano’s proprietary plasma technology, we offer several product series, each with its unique field of application.

Our products range from versatile LAB tools to highly efficient mass production FAB tools.

sparknano products

Our product portfolio consists of

Labline Series

Designed for versatility and flexibility

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Vellum Series

Market leading large area fab solution for flat samples

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Omega Series

Proven roll-to-roll (R2R) system for ultra-high-volume Spatial ALD production on flexible foils

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Why SparkNano products 

In addition to addressing global green challenges, our equipment is
utilized for optimizing OLED displays, flexible electronics, improving yield
in photovoltaic panels, and various other applications.

Our products contribute to the decarbonization effort by offering a series
that enables our customers to develop:

The best possible performing materials to improve the efficiency and lifetime of devices such as electrolyzers, fuel cells, and batteries.


The solution for minimizing the use of scarce materials while coating very large surfaces at high speeds. This enables not just massive cost reduction in production, but an essential breakthrough for sustainability as well.

precursor utilization efficiency

A maximized precursor utilization efficiency, towards zero waste by depositing the exact right amount of material in exactly the right place.

Find out how our technology can help you innovate