Labline series
Our Labline series are designed for versatility and flexibility and are especially suited for process development and pilot-line production. Through our unique design, it is possible to accommodate a wide variety of types and sizes of substrates and different materials.
All SparkNano products are modularly designed and can be used for both thermal or plasma enhanced Spatial ALD. In combination with plasma enhanced Spatial ALD, we offer maskless patterned deposition.
The Labline series is available in two sizes; for maximum 6 inch and for maximum 12 inch substrates . The Labline series combines the highest quality Spatial ALD film depositions together with the flexibility of the system to fit future needs and applications.
Labline 6″
Technical features
Flat substrates like polymer and metal foils, wafers, glass and porous substrates
Substrate size
A free envelope of 175 mm x 215 mm x 5 mm is available. In this volume any flat substrate can be placed with a substrate specific holder
Process
Both thermal and plasma enhanced Spatial ALD
Labline 12″
Technical features
Substrate types flat substrates like polymer and metal foils, wafers, glass and porous substrates
Substrate size
A free envelope of 320 mm x 360 mm x 5 mm is available. In this volume any flat substrate can be placed with a substrate specific holder
Process
Both thermal and plasma enhanced Spatial ALD
Download the complete data sheet
for the Labline Series now.
Other SparkNano Spatial ALD solutions
Omega Series
Proven roll-to-roll (R2R) system for ultra-high-volume Spatial ALD production on flexible foils
See product