Publications

Explore the latest scientific publications on Spatial Atomic Layer Deposition and research contributions.

Toward 3D Thin-Film Batteries: Optimal Current-Collector Design and Scalable Fabrication of TiO2 Thin-Film Electrodes

Publication source ACS Applied Energy MaterialsVolume 2, Issue 3, 25 March…

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Large-area spatial atomic layer deposition of amorphous oxide semiconductors at atmospheric pressure

Publication source Journal of the Society for Information DisplayVolume 27,…

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Plasma-enhanced spatial ALD of TiO2

Plasma-enhanced spatial ALD of…

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Shaping the European Lithium-Ion Battery Industry

We’re pleased to share that SparkNano has been featured in Battery News‘…

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Electrolysers: Opportunities for the High-Tech Manufacturing Industry

The use of green hydrogen has gained momentum in recent years, especially with…

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Advancements in ALD Thin Film Conformality

In this study, we demonstrate the conformal deposition of SiO2 and TiO2 thin…

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Nanotechnology with the Potential for Global Impact

How Spatial ALD solves the global iridium challenge to unlock for the scaling…

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