Publications
Explore the latest scientific publications on spatial Atomic Layer Deposition and research contributions.
Low temperature spatial ALD of LiF films for Li-ion batteries
Low Temperature Spatial Atomic Layer Deposition of LiF films for Li-ion…
Read moreElectrolysers: Opportunities for the High-Tech Manufacturing Industry
VoltaChem powered by TNO Discussion paper, March 2023 The use of green hydrogen…
Read moreExcellent conformality of atmospheric-pressure plasma-enhanced spatial ALD with subsecond plasma exposure times
Excellent conformality of atmospheric-pressure plasma-enhanced spatial atomic…
Read moreLarge-area spatial atomic layer deposition of amorphous oxide semiconductors at atmospheric pressure
Publication source Journal of the Society for Information Display Volume 27,…
Read moreToward 3D Thin-Film Batteries: Optimal Current-Collector Design and Scalable Fabrication of TiO2 Thin-Film Electrodes
Publication source ACS Applied Energy Materials Volume 2, Issue 3, 25 March…
Read moreHighly Efficient and Stable Semi-Transparent p-i-n Planar Perovskite Solar Cells by Atmospheric Pressure Spatial Atomic Layer Deposited ZnO
Publication source Volume 2, Issue 10, 1 October 2018, Article number 1800147…
Read moreAtmospheric spatial atomic layer deposition of ZnOS buffer layers for flexible Cu(In,Ga)Se2 solar cells
Publication source Volume 36, Issue 5, 1 September 2018, Article…
Read moreAtmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
Low Temperature Spatial Atomic Layer Deposition of LiF films for Li-ion…
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