Publications

Explore the latest scientific publications on Spatial Atomic Layer Deposition and research contributions.

Highly Efficient and Stable Semi-Transparent p-i-n Planar Perovskite Solar Cells by Atmospheric Pressure Spatial Atomic Layer Deposited ZnO

Publication source Volume 2, Issue 10, 1 October 2018, Article…

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Atmospheric spatial atomic layer deposition of ZnOS buffer layers for flexible Cu(In,Ga)Se2 solar cells

Publication source Volume 36, Issue 5, 1 September 2018, Article…

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Low temperature spatial ALD of LiF films for Li-ion batteries

Low Temperature Spatial Atomic Layer Deposition of LiF films for Li-ion…

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Toward 3D Thin-Film Batteries: Optimal Current-Collector Design and Scalable Fabrication of TiO2 Thin-Film Electrodes

Publication source ACS Applied Energy MaterialsVolume 2, Issue 3, 25 March…

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Large-area spatial atomic layer deposition of amorphous oxide semiconductors at atmospheric pressure

Publication source Journal of the Society for Information DisplayVolume 27,…

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Excellent conformality of atmospheric-pressure plasma-enhanced spatial ALD with subsecond plasma exposure times

Excellent conformality of atmospheric-pressure plasma-enhanced spatial atomic…

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Plasma-enhanced spatial ALD of TiO2

Plasma-enhanced spatial ALD of…

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Shaping the European Lithium-Ion Battery Industry

We’re pleased to share that SparkNano has been featured in Battery News‘…

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Electrolysers: Opportunities for the High-Tech Manufacturing Industry

The use of green hydrogen has gained momentum in recent years, especially with…

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Advancements in ALD Thin Film Conformality

In this study, we demonstrate the conformal deposition of SiO2 and TiO2 thin…

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Nanotechnology with the Potential for Global Impact

How Spatial ALD solves the global iridium challenge to unlock for the scaling…

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