Publications
Explore the latest scientific publications on Spatial Atomic Layer Deposition and research contributions.
Toward 3D Thin-Film Batteries: Optimal Current-Collector Design and Scalable Fabrication of TiO2 Thin-Film Electrodes
Publication source ACS Applied Energy MaterialsVolume 2, Issue 3, 25 March…
Read moreLarge-area spatial atomic layer deposition of amorphous oxide semiconductors at atmospheric pressure
Publication source Journal of the Society for Information DisplayVolume 27,…
Read moreShaping the European Lithium-Ion Battery Industry
We’re pleased to share that SparkNano has been featured in Battery News‘…
Read moreElectrolysers: Opportunities for the High-Tech Manufacturing Industry
The use of green hydrogen has gained momentum in recent years, especially with…
Read moreAdvancements in ALD Thin Film Conformality
In this study, we demonstrate the conformal deposition of SiO2 and TiO2 thin…
Read moreNanotechnology with the Potential for Global Impact
How Spatial ALD solves the global iridium challenge to unlock for the scaling…
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