Spatial ALD of LiF for Li-ion Battery Manufacturing
The SparkNano spatial ALD Hub welcomes nano coating enthusiasts—from R&D experts to industrial manufacturers—to exchange knowledge about spatial ALD and learn from one another.
We believe spatial Atomic Layer Deposition (ALD) is key to enabling large-scale manufacturing of next-generation devices toward a clean world for life. Our Hub is open to both experts and novices in research and manufacturing. We offer a platform to share knowledge, present scientific publications, explore cutting-edge applications in batteries, solar, hydrogen, opto-electronics and more as well as practical system experiences to drive advanced manufacturing together through spatial ALD. Together we can help researchers and manufacturers achieve the next generation of products shaping a clean world for life.
Join our expert webinar
We are excited to invite you to a 60-minute expert webinar, including a live Q&A session, featuring Dr. Paul Poodt, who will share scientific insights into spatial ALD for batteries, specifically LiF thin-film deposition for Li-ion battery electrodes—a key enabler in our mission toward a clean world for life. This expert webinar of Tuesday 8 July is now on demand for all: Spatial ALD of LiF for Li-ion Battery Manufacturing.
Alexander Bouman, Commercial Director at SparkNano
Paul Poodt, CTO at SparkNano and Associate Professor at Eindhoven University of Technology
Webinar introduction: spatial ALD for energy applications
Alexander Bouman, Commercial Director at SparkNano since 2022, will kick off the webinar. With over 15 years of leadership in high-tech industries—spanning energy, advanced materials, and semiconductor technology—Alexander is a trusted partner to customers scaling innovations in batteries, solar, hydrogen, and optoelectronics. Join us in this informative session where we explore spatial Atomic Layer Deposition (ALD) technology and how it addresses todays battery applications in the Energy market.
He holds a degree in Chemical Engineering from Eindhoven University of Technology and works closely with the rest of SparkNano’s expert team and partners like Air Liquide, to drive the energy transition with impactful spatial ALD nano-coating solutions for a clean, sustainable world.
Key presentation: Spatial ALD of LiF for Li-ion Battery Manufacturing
Alexander introduces our keynote speaker, Dr. Paul Poodt, Founder & CTO at SparkNano and Associate Professor at TU Eindhoven. Paul brings deep expertise from his roles as Program Manager and Senior Scientist at TNO Holst Centre and his academic background with a Ph.D. in Physics from Radboud University Nijmegen. He holds 13 patents and actively fosters collaboration between industry and academia
Paul will explain why SparkNano spatial ALD is the ideal technique for applying nanoscale coatings in next-generation battery applications, focusing on new research breakthroughs in SparkNano’s LiF deposition process for Li-ion batteries.
Key highlights of Paul’s presentation
This webinar features exclusive research only to be presented first in June in Korea at the AVS 25th International Conference on Atomic Layer Deposition (ALD 2025) featuring the 12th International Atomic Layer Etching Workshop (ALE 2025):
- The limitations of conventional LiF deposition: high temperatures, contamination (C,O), and reliance on hazardous or greenhouse gas-based co-reactants.
- SparkNano’s solution using a new lithium precursor, LIFA (developed with Air Liquide Advanced Materials), combined with plasma-enhanced spatial ALD to deposit highly pure, conformal LiF films at 100–200°C.
- Elimination of PFAS-derived or hazardous co-reactants, making the process safer, cleaner, and compatible with sensitive materials like lithium metal anodes.
- Demonstrated deposition of polycrystalline, C- and O-free LiF films with excellent conformality and ambient stability.
- Proven electrochemical performance improvements across anode and cathode materials like graphite, silicon, and LMNO.
- A scalable path to industrial production using SparkNano’s atmospheric-pressure roll-to-roll ALD system, enabling high-performance Li-ion batteries for electric heavy-duty vehicles, advanced mobility platforms such as drones and next-gen EV’s and next-generation aerospace, and more.
Watch this exciting presentation of Dr. Paul Poodt and Q&A, moderated by Alexander Bouman, and explore how SparkNano spatial ALD overcomes current limitations in battery manufacturing—and how SparkNano’s technology and equipment can power your next-gen battery innovations. More about the research abstract and key contributors Joost van Himste, Niels Hoogendoorn, Paul Poodt – SparkNano Jamie Greer, Nicolas Blasco – Air Liquide Advanced Materials can be found here.