Omega Series
Proven roll-to-roll (R2R) system for ultra-high-volume Spatial ALD production on flexible foils
The optimized design enables ultrafast deposition onto flexible substrates, such as polymer or metal foils.
The system can be configured for thermal or plasma enhanced Spatial ALD to match the desired material to be deposited. The web width, web speed and deposition materials will be ready to be adopted according to the overall customer application. The standard web-with is ranging from 300 to 2000 mm and a web speed up to 60 m/min.
SparkNano uses proven technology used for other high throughput energy applications. Additionally, we offer optional integrational designs for line integration and for example interleafs.
Key features Omega Series
Substrate types
Polymer or metal foils
Substrate size
A foil width of 300 mm upto 2000 mm.
The maximum foil thickness depends on the material properties in combination with the minimal and maximal web tension and drum diameter
Process
Both thermal as plasma enhanced s-ALD
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for the Omega Series now.
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