Omega Series

Proven roll-to-roll (R2R) system for ultra-high-volume Spatial ALD production on flexible foils

The optimized design enables ultrafast deposition onto flexible substrates, such as polymer or metal foils.  

The system can be configured for thermal or plasma enhanced Spatial ALD to match the desired material to be deposited.  The web width, web speed and deposition materials will be ready to be adopted according to the overall customer application. The standard web-with is ranging from 300 to 2000 mm and a web speed up to 60 m/min. 

SparkNano uses proven technology used for other high throughput energy applications. Additionally, we offer optional integrational designs for line integration and for example interleafs. 

SparkNano Omega Series

Key features Omega Series

Substrate types

Polymer or metal foils

Substrate size

A foil width of 300 mm upto 2000 mm.

The maximum foil thickness depends on the material properties in combination with the minimal and maximal web tension and drum diameter

Process

Both thermal as plasma enhanced s-ALD

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for the Omega Series now.

Other SparkNano Spatial ALD solutions

Vellum Series

Market leading large area fab solution for flat samples

See product

Labline series

Designed for versatility and flexibility

See product

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