Roll-to-roll (R2R) system for ultra-high-volume
SparkNano Omega™ system
The optimized design enables ultrafast deposition onto flexible substrates, such as polymer or metal foils.
The system can be configured for thermal or plasma enhanced spatial ALD to match the desired material to be deposited. The web width, web speed and deposition materials will be ready to be adopted according to the overall customer application. The standard web-with is ranging from 0,3 meters to 1,5 meters and a web speed up to 80 m/min.
SparkNano uses proven technology used for other high throughput energy applications. Additionally, we offer optional integrational designs for line integration and for example interleafs.
Key features SparkNano Omega™ system
Substrate types
Polymer or metal foils
Substrate size
A foil width of 0,3 meters up to 1,5 meters
The maximum foil thickness depends on the material properties in combination with the minimal and maximal web tension and drum diameter
Process
Both thermal as plasma enhanced spatial ALD
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for the SparkNano Omega™ now.
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