Publications
Explore the latest scientific publications on Spatial Atomic Layer Deposition and research contributions.
Low temperature spatial ALD of LiF films for Li-ion batteries
Low Temperature Spatial Atomic Layer Deposition of LiF films for Li-ion…
Read moreShaping the European Lithium-Ion Battery Industry
We’re pleased to share that SparkNano has been featured in Battery News‘…
Read moreElectrolysers: Opportunities for the High-Tech Manufacturing Industry
VoltaChem powered by TNO Discussion paper, March 2023 The use of green hydrogen…
Read moreNanotechnology with the Potential for Global Impact
How Spatial ALD solves the global iridium challenge to unlock for the scaling…
Read moreExcellent conformality of atmospheric-pressure plasma-enhanced spatial ALD with subsecond plasma exposure times
Excellent conformality of atmospheric-pressure plasma-enhanced spatial atomic…
Read moreLarge-area spatial atomic layer deposition of amorphous oxide semiconductors at atmospheric pressure
Publication source Journal of the Society for Information Display Volume 27,…
Read moreToward 3D Thin-Film Batteries: Optimal Current-Collector Design and Scalable Fabrication of TiO2 Thin-Film Electrodes
Publication source ACS Applied Energy Materials Volume 2, Issue 3, 25 March…
Read moreHighly Efficient and Stable Semi-Transparent p-i-n Planar Perovskite Solar Cells by Atmospheric Pressure Spatial Atomic Layer Deposited ZnO
Publication source Volume 2, Issue 10, 1 October 2018, Article number 1800147…
Read moreAtmospheric spatial atomic layer deposition of ZnOS buffer layers for flexible Cu(In,Ga)Se2 solar cells
Publication source Volume 36, Issue 5, 1 September 2018, Article…
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