Read our case study describing how SparkNano uses IBS’s 𝗳𝘂𝗹𝗹 𝗰𝗮𝗿𝗯𝗼𝗻 𝗮𝗶𝗿 𝗯𝗲𝗮𝗿𝗶𝗻𝗴𝘀 at 𝗵𝗶𝗴𝗵 𝘁𝗲𝗺𝗽𝗲𝗿𝗮𝘁𝘂𝗿𝗲𝘀 to enable groundbreaking Spatial ALD.

SparkNano aimed to create an accurate, scalable, and cost-effective machine design featuring a mechanically stiff structure and a consistent process gap, with a constant Z-height. Components needed to handle maximum application temperatures of 250°C, maintaining a particle-free production environment and preventing contamination from greases.

IBS supported SparkNano by integrating custom-made full carbon air bearings, withstanding up to 250°C. These non-contact air bearings without housing, produce a stable and frictionless air gap, facilitating a stable Z-height. The air bearings operate lubricant and particle free in high-temperature environments, with infinite lifetime performance, requiring zero maintenance.

Jeroen Smeltink, SparkNano: “From the design phase to the final product, we experienced a genuine partnership with IBS, which greatly aided SparkNano in the process of scaling up and industrialising our Spatial ALD lab and fab equipment.”

Read the case study here.

About IBS

IBS Precision Engineering delivers world-class measurement, positioning, and motion systems where ultra-high precision is required. From complex carbon-fiber jet engine components to semiconductor chips accurate to tens of atoms; we provided key enabling technologies.

About the Interviewee

Jeroen Smeltink, background in Mechanical Engineering, former Senior System Architect at TNO – Senior System Architect at SparkNano. Learn more about SparkNano’s state-of-the-art product portfolio.

About SparkNano

SparkNano develops and supplies Spatial Atomic Layer Deposition equipment for energy, OLED, and related applications. SparkNano was founded in 2018 as a spin-off of TNO (the Netherlands Organization of Applied Scientific Research). The company’s products enable its customers to seamlessly scale from lab-to-fab. Next to the high-quality equipment, an experienced team also supports process development and optimization, provides application support, and yield & and performance management. SparkNano is located in the Brainport ecosystem in Eindhoven.

Learn more about Spatial ALD

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